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SMT nozzles leave no energy wasted

Date: 2014-08-26
Views: 28

SMT nozzles leave no energy wasted

作者: www.qy-smt.com 发表时间: 2013-08-26

 

Watermarks, caused by the drying of droplets leaked from the immersion nozzle, and particles drawn onto the wafer surface by the water film are significant sources of defects. But don’t worry, there are better solutions. Guaranteed of good performance, you won’t find one that will allow leaked water among the list of smt nozzles.

 

Understanding that bubbles and leaked water droplets need to be avoided at all costs, a flexible nozzle will be necessary. Taking a panasonic nozzle as an example, its performance varies with different surface tension to contain the immersion water. The combination of this nozzle design, high water flow rate (~300 ml/min), and airless fluid handling enable immersion scanners to deliver defect levels comparable to dry manufacturing, without impacting throughput. The systems are also fully compatible with a wide range of ArF resists and topcoats (developer soluble and developer nonsoluble), allowing wafers to be processed at maximum throughput with no water spots or backside wafer contamination. Besides, the presence of air bearings in the nozzle or an air curtain for containment of the immersion water is particularly problematic and was successfully avoided in the panasonic nozzle.

Well designed smt nozzles approach ideal water flow with no water leaked. The leading-edge nozzles deliver not only the water flows required for users’ specific needs, but also provide an example of energy-saving.

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